Efek konsentrasi Prekursor Terhadap SIFAT FISIK Film Tipis BASRTIO3 (BST) SRUKRUR MFM DAN MFS yang Ditumbuhkan dengan SPIN COATING

Abstract

An BST precursor was synthesized by mixing Barium acetate 99,9%, Strontium acetate 99,99% , Titanium isopropoxide 99,999% in 2-methoxyethanol 99,9% and acetic acid glasia 100% at 120^oC along 3 hours. The BST precursor concentration were 0.1 M and 0.5 M.  By employing CSD method, the BST precursor was spin coated on p-type Si (100) substrate at 3000 rpm for 30 seconds and pyrolyzed at 130^oC at 10 minutes to obtain BST thin films. The BST thin films were annealed for 15 hours at 1000^oC. The BST thin films structure were MFM and MFS, characterized their physical properties. It was found that grain size and thickness for the MFM structure at the BST 0,1 M were < 0.3μm and 0.6 μm., And  the BST 0.5 M were 0.5–1.0 μm and 0.9 μm. Grain size and thickness for the MFM structure at the BST 0.1 M were < 0.3μm and 0.6 μm, for BST 0.5M were 0.5–1μm and 0.8 μm .Latis constant 3.936 Ǻ. Composition of BST thin films was  same as BST precursor.

Key words : Ferroelektrik, BST, Spin Coating.