PENENTUAN KONSENTRASI UNSUR PEMBANGUN SENSOR PIEZOELEKTRIK MENGGUNAKAN METODA X-RAY FLUORESCENCE (XRF) DAN ENERGY DISPERSIVE X-RAY MICROANALYSIS (EDAX)

Abstract

ABSTRACT

Piezoelectric sensor is a device which is widely used for various purposes of design and development of electronic instruments. Piezoelectric sensor generates a voltage when mechanical stress was given. The purpose of this research is to determine the concentration of elements that build the piezoelectric sensor. There are two methods in this research respectively X-Ray Fluorescence and Energy Dispersive X-Ray Microanalysis. Data from both methods were compared with the result of measurement using X-Ray Diffraction. Based on data analysis obtained that piezoelectric sensors composed by three elements with the highest concentration of 93.11% Rh, 3.788% Pd and 1.009% Ba by using X-Ray Fluorescence, and 19.56% Zr, 72.22% Pb, 8.22% from measurement using Energy Dispersive X-Ray Microanalysis. Meanwhile, the results of XRD measurements obtained that a piezoelectric sensor consists of a phase PZT phase Ag and Pb (TixZr1-x) O3 with x  0.3. Data of measurement using X-Ray Diffraction supports finding of Energy Dispersive X-Ray Microanalysis method.

Keywords: Concentration of element, Energy Dispersive X-Ray Microanalysis, Piezoelectric sensor, X-Ray Fluorescence, X-Ray Diffraction