EFEK GIANT MAGNETORESISTANCE PADA MULTILAYER (NiCoFe/Cu) YANG DITUMBUHKAN DENGAN METODE DC-UBMS

Abstract

In this paper, we present results  of  a study on (NiCoFe/Cu) multilayer grown by DC unbalanced magnetron sputtering (DC-UMBS) method onto Si (100) substrate. The aim of this study was to determine the effect of the number of layers in (NiCoFe/Cu) multilayer on the magnetoresistance ratio (MR). For ferromagnetic materials used Ni₆₀Co₃₀Fe₁₀ whereas non magnetic material is Cu. Multilayer structure has been prepared consisting of 2, 3 and 4 layer. One layer consists of NiCoFe/Cu/NiCoFe thin films. The growth parameters for both NiCoFe and Cu layer are: temperature of 100 ⁰C, growth pressure of 5.2 x10^-1 torr, flow rate of Ar gas of 100 sccm, time of growth of 5 minutes, applied voltage of 600 V, and plasma currents of 0.36 A. After measurement of the MR ratio with the number of layer 2, 3 and 4 layers, the MR ratios are: 11.65%, 35.60% and 45.27%, respectively. From these results it can be concluded that as number of layers increases, the MR ratio of (NiCoFe/Cu) multilayer increases.

Keyword: DC-UBMS, GMR, multilayer, NiCoFe, MR ratio